IBIC experiement, examples

In addition to many of ion beam analysis techniques that employ focused ion beams for the analysis of sample composition, microprobe technique IBIC (Ion Beam Induced Charge) provides information about the charge transport properties in the studied semiconductor samples. After charge carriers have been created along the trajectory of every single ion that is entering the sample and in the presence of internal or externally applied electric field, a charge signal is induced and measured at the sample electrodes. By knowing the exact position of every single ion and by using the measurement of the induced signal height and shape, imaging of charge transport properties of studied material can be performed. Many examples of IBIC applications in its frontal and lateral modes, application of technique to studies of different materials and devices, and in particular IBIC monitoring of radiation damage creation will be presented.